Babysitter cleanroom-metrology-controller

Nanofabrication metrology skill for process control with CD-SEM, ellipsometry, and profilometry

install

source · Clone the upstream repo

git clone https://github.com/a5c-ai/babysitter

Claude Code · Install into ~/.claude/skills/

T=$(mktemp -d) && git clone --depth=1 https://github.com/a5c-ai/babysitter "$T" && mkdir -p ~/.claude/skills && cp -r "$T/library/specializations/domains/science/nanotechnology/skills/cleanroom-metrology-controller" ~/.claude/skills/a5c-ai-babysitter-cleanroom-metrology-controller && rm -rf "$T"

manifest: library/specializations/domains/science/nanotechnology/skills/cleanroom-metrology-controller/SKILL.md

Cleanroom Metrology Controller

Purpose

The Cleanroom Metrology Controller skill provides comprehensive in-line metrology for nanofabrication process control, enabling precise measurement and monitoring of critical dimensions, film thicknesses, and pattern quality.

Capabilities

CD-SEM measurement recipes
Spectroscopic ellipsometry analysis
Film thickness mapping
Surface profilometry
Defect inspection
Overlay measurement

Usage Guidelines

Metrology Control

CD-SEM Measurements
- Develop automated recipes
- Calibrate against reference
- Track process variation
Ellipsometry
- Select appropriate model
- Map thickness uniformity
- Characterize optical constants
Defect Inspection
- Set detection thresholds
- Classify defect types
- Track yield trends

Process Integration

All fabrication processes
Analysis Pipeline Validation

Input Schema

{
  "measurement_type": "cd_sem|ellipsometry|profilometry|defect",
  "target_parameter": "string",
  "wafer_map": {"sites": "number", "pattern": "string"},
  "specification": {
    "target": "number",
    "tolerance": "number"
  }
}

Output Schema

{
  "measurements": [{
    "site": "string",
    "value": "number",
    "unit": "string"
  }],
  "statistics": {
    "mean": "number",
    "std_dev": "number",
    "range": "number"
  },
  "uniformity": "number (%)",
  "pass_fail": "boolean",
  "trending_data": {"dates": [], "values": []}
}